VLSI TECHNOLOGY By Simon Sze (9780070582910)

The book is intended as a textbook for senior undergraduateor first-year graduate students in applied physics, electrical engineering, and materials science; it assumes that the reader has already acquired an introductory understanding of the physics and technology of semiconductor devices. Because it elaboratees on integrated circuit (IC) processing technology in a detailed and comprehensive manner, it can also serve as a reference for those actively involved in integrated circuit fabrication and process development.